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ASML Rides the Immersion Lithography Wave
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Immersion lithography does not use ion beams, but photon beams at 193nm wavelength.
Apr 07 09:23 am
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Semiconductor Lithography Sector Continues to Outperform Semiconductor Equipment Market
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The wavelength for most advanced lithography tools (including immersion) is 193nm, and not 248nm
Mar 26 09:13 am
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Latest | Highest ratedASML Rides the Immersion Lithography Wave [View article]
Semiconductor Lithography Sector Continues to Outperform Semiconductor Equipment Market [View article]