ASML is entering mass production of the equipment and expects to ship 12 units this year and 24 units next year, which ramps up from 14 total in the past three years. Each unit has a starting price of $119M.
Extreme-ultraviolet or EUV lithography uses ultraviolet light to etch smaller patterns on wafers.
The units can reportedly process 2K wafers per day.
ASML holds about an 80% share of the global chip lithography market and clients include Samsung and Intel.
ASML shares are down 1% premarket.
Now read: Booming Holland »
Subscribe for full text news in your inbox